8715 Mass Flow Controller

Type 8715 controls the mass flow of gases through a sensor element which is not in direct contact with the gas itself.

The measured value provided by the sensor will be compared in the digital control electronics with the predefined set point according to the signal; if a control difference is present, the control value output to the proportional valve will be modified using a PI control algorithm.

In this way, the mass flow can be maintained at a fixed value or a predefined profile can be followed, regardless of pressure variations or other changes in the system.

Type 8715 can optionally be calibrated for two different gases, the user can switch between these two gases. As control element a direct-acting proportional valve guarantees a high sensitivity and a good control characteristics of the MFC.

This instrument communicates digitally with master devices, no further A/D conversions needed. The Mass Flow Communicator software can be used for parameterization and diagnosis.